MSD MEMS 3 AXIS vibration sensors
XYZ 3Axis, + / – 2000mg, applying in Robot Arm Shift, Turbo Pump axis deviation, machine vibration … and so on, to improve the equipment caused by abnormal vibration products and the problem of yield decline.
Install TurboPump vibration monitoring system, use to monitor the amount of TurboPump operating vibration, in order to reduce the process of various types of Wafer defect rate due to excessive vibration generated.
MSD MEMS 3 Axis SPECIFICATION
- Measurement：+/-2000mg
- Axis：X, Y, Z
- Sensitivity：0.01g
- Output Data Rate(Hz) ：50Hz
- Sensor Number：1 CH
- Up/Low Limitation Alarm Setting
- Alarming Buzzer
- Offset Setting
- Zero Setting
- NC/NO Alarm output
- RS-485(Modbus)
