The new SLQ-QT105, customized integrated coating system, is a semiconductor-grade sensor solution for hydrocarbon liquids such as photo resists and solvents with flow rates below 120 ml / min. SENSIRION was proven hot micro sensor technology, it will open the new sensitivity, reliability and speed of vision. Rapid response time of SLQ – QT105 can accurately monitor high dynamic processes such as fast photo resist spray. This reliable sensor is equipped with a 4x3mm PFA pipe connector without any moving parts for monitoring non-intrusive and direct current. With intelligent digital interface and a strong RS485 communication interface, providing long-distance and Bus compatibility.
Product features：
- Flow rate below 120 ml / min
- Without any moving parts and DC way monitoring
- Very low flow rate and extremely high sensitivity
- Cleanliness guarantee
- Fast response time as low as 30ms
- Outstanding chemical resistance, inertia materials
- RS485 digital communication interface
- Material: PCTFE, quartz glass
- Used in photo resist and solvent
Application areas：
- High – end semiconductor process control
- Photo resist coating