MSD is the abbreviation of Multi Sensor Device, which is our R & D platform. This platform can change different sensors according to customer needs (such as pressure difference, temperature and humidity pressure, vibration, Particle, photo resist flow…or special customer requirements), to apply to the machine end of a variety of sensing needs. The addition of the required MSD to the production equipment of the semiconductor or panel plant allows immediate monitoring of changes in key parameters to improve the rate of control and scrape improvement of recurrence of the program.

MSD is divided into stand-alone and system version, its frameworks and features as follows: