The core process of semiconductor is in the shadow technology, and the photo resist coating is a very important part of the process. Although the process of photo resist spray keeps more space to reduce the uneven coverage, but the waste was caused by spraying. However, the spray optimizing will be increased in the number of process conditions and parameters of the tightening and photo resist pressure changes from the small bubbles produced by the uneven coverage, which cannot be distinguish by the naked eyes and the instruments and also can increase the risk of scrapping rate of heavy labor; especially photo resist is a high price of fixed material costs. How to reduce the amount of spray and heavy labor rate is concerned by FAB factory competitiveness and profitability at stake.
In recent years, the issue of energy saving is increasing, GUTC is dedicated in the reducing consumption, cost down and competitiveness to the priority of customer orientations, and the instantaneous FDC monitoring system for photo resist injection is developed. Each time the photo resist is instantly uploaded to IT side of the FDC system, the system automatically based on the amount of spray data to achieve the timely reduction of abnormal products.
The system is based on a semiconductor device communication protocol (SECS) frameworks that allows Fab users to simultaneously capture multiple real time photo resist dispense and upload data to SPC or FDC systems for real-time monitoring and calculation to achieve immediate prevention Bubble caused by spray map and caused by the poor coating to achieve the amount of photo resist spray savings, effectively improve the photo resist spray map caused by the rework rate reduction. SENSIRION, SLQ - QT105 liquid flow sensor is specifically designed for the use in semiconductor photo resist coating. With its revolutionary in small size, no moving parts, the RS485 interface is well suited for use in coating systems.
n Detection of photo resist coating n Detect pump failure
n Detection of photo resist spray n Effectively reduce the rework rate
n Detect tiny bubbles n Diverse recipes with diverse specs
n Detection coverage unevenness / poor coating n Fast response time as low as 30ms
n Detect valves leaking n Straight pipe, no moving parts
n Detection of broken tubes