Pusher Up/Down Pressure Monitor System

Machine：Ebara FREX300SII

Applications：

Due to long-term up / down action in the Ebara CMP machine Pusher, causing the bottom of the supply air cylinder gas pipe in wearing, may cause up / down abnormal, the chip was scratched or crashed. But by the addition of Pressure Sensor to monitor the pressure of the pipeline, it can be early to monitor the pipeline to prevent product scrap or yield suffers. As shown below, the T-joint will provide air cylinder up / down air pressure to pressure sensor long-term monitoring.

System frameworks：