Chiller Water Flow and Temp Detection

Machine : AMAT DPS

Preface :

The chiller of AMAT DPS metal machine is a very important indicator to the liquid flow and temperature, and the machine has no two important indicators of digital in the original design, when the chiller traffic and temperature is abnormal which can not immediately know, that will cause a large number of wafer risk of scrapping.

Using MSD to connect four groups of sensors to monitor the liquid flow and temperature of four chiller, if abnormal, that is, using the MSD alarm or stop the machine.

System frameworks：