Hot Plate Temperature Monitoring System
Machine : DNS
Preface :
Because the machine cannot monitor the hot plate temperature timely, which caused to the wafer oblique placed on the chuck and uneven heating cannot be blocked in time.
Use MSD to extract the temperature I / O board signal and chuck pins up / down signal, in the use of file pass data transmission, the hot plate temperature upload to the system monitoring to achieve immediate blocking function.
System frameworks：
