ESC (electrostatic chuck) Install TC sensor

Machine : TEL 9600

Preface :

Because the Chiller temperature of ESC cannot be easy to Double Confirm (the use of artificial one by one detection, but the temperature cannot be consistent), resulting in machine problems, cannot clearly clarify the problem.

As the ESC has a TC Sensor for the original machine detection, it is expected in the vicinity of the sensor to re-install MSD TCSensor as the use of Double Confirm.

System frameworks：