Chiller water Flow and Temp. sensor to SPC

Machine : TEL DRM

Preface :

Because the DRM near the Chamber side chiller has no temp in design. Sensor (machine in subfab chillcontroller set 60 ℃), the chip in the RF etching, due to chiller capacity (Flow: 20 l / min) is insufficient; the heat does not take the chips caused by over etching or insufficient etching to the product scrapped.

 In the chamber chill out place to install a group of Temp / Flow sensor, in addition to monitor Chill’s ability (Flow), but also to monitor the temperature to prevent re-scrapping.

System frameworks：