TEL DRM Chiller water Flow and Temp. sensor to SPC

Machine：TEL DRM

Applications：

Due to DRM near the Chamber side chiller has no design temp sensor, while the chip in the RF etching, due to chiller capacity (Flow: 20 l / min) is insufficient, the heat does not take the chips caused by over etching or insufficient etching to the product scrapped, so the chamber chill out of the installation of a Temp / Flow sensor, in addition to monitor the capacity of Chill (Flow), but also to monitor the temperature to prevent re-scrapping.

System frameworks：